JPS6197834U - - Google Patents
Info
- Publication number
- JPS6197834U JPS6197834U JP18418784U JP18418784U JPS6197834U JP S6197834 U JPS6197834 U JP S6197834U JP 18418784 U JP18418784 U JP 18418784U JP 18418784 U JP18418784 U JP 18418784U JP S6197834 U JPS6197834 U JP S6197834U
- Authority
- JP
- Japan
- Prior art keywords
- cooling cover
- transparent cooling
- processing chamber
- ultraviolet lamp
- accommodates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984184187U JPH0452992Y2 (en]) | 1984-12-04 | 1984-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984184187U JPH0452992Y2 (en]) | 1984-12-04 | 1984-12-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6197834U true JPS6197834U (en]) | 1986-06-23 |
| JPH0452992Y2 JPH0452992Y2 (en]) | 1992-12-14 |
Family
ID=30741672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984184187U Expired JPH0452992Y2 (en]) | 1984-12-04 | 1984-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452992Y2 (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51140574A (en) * | 1975-05-30 | 1976-12-03 | Hitachi Ltd | Method of cleaning silicon substrate plate |
| JPS5861831A (ja) * | 1981-10-07 | 1983-04-13 | Toshiba Electric Equip Corp | 光照射装置 |
| JPS59124124A (ja) * | 1982-12-29 | 1984-07-18 | Fujitsu Ltd | 半導体装置の製造方法 |
-
1984
- 1984-12-04 JP JP1984184187U patent/JPH0452992Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51140574A (en) * | 1975-05-30 | 1976-12-03 | Hitachi Ltd | Method of cleaning silicon substrate plate |
| JPS5861831A (ja) * | 1981-10-07 | 1983-04-13 | Toshiba Electric Equip Corp | 光照射装置 |
| JPS59124124A (ja) * | 1982-12-29 | 1984-07-18 | Fujitsu Ltd | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0452992Y2 (en]) | 1992-12-14 |